Thomas Faure is an author at Photometrics (United States) specializing in integrated circuits, optical properties, and mechanical engineering.
Top concepts
EngineeringApplied PhysicsOptoelectronicsMaterial ScienceMicroelectronicsMicrofabricationOptical MaterialsOptical PropertiesIntegrated CircuitsOptical Engineering
Publications per year
2008–2008
1
1
Characterization of binary and attenuated phase shift mask blanks for 32nm mask fabrication
Thomas Faure, Emily Gallagher, M. Hibbs et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 18 citations
Materials Science, Optical Engineering, Optical Materials +15
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