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Author

Steven W. Burns

Oak Ridge National Laboratory

Also Known As

Steven W. Burns

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Publications

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Citations

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H-Index

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Oak Ridge National Laboratory
SW

About

Steven W. Burns is an author at Oak Ridge National Laboratory specializing in instrumentation, crystalline defects, and technology.

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Education

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Engineering

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Applied Physics

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Crystalline Defects

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Microscopy

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Steven W. Burns

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Publications

12

Citations

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H-Index

YearCitations

<title>Direct to digital holography for semiconductor wafer defect detection and review</title>

C. E. Thomas, Tracy M. Bahm, L. R. Baylor,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2002

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