Concepedia

Steven W. Burns

SW

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Publications

1

Citations

12

H-Index

1

Active since

2002

Affiliations

Oak Ridge National Laboratory(Current)

Steven W. Burns is an author at Oak Ridge National Laboratory specializing in instrumentation, crystalline defects, and technology.

Top concepts

Publications per year

2002–2002

1

Publications

1

<title>Direct to digital holography for semiconductor wafer defect detection and review</title>

C. E. Thomas, Tracy M. Bahm, L. R. Baylor et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

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