Concepedia

Author

Tracy M. Bahm

Oak Ridge National Laboratory

Also Known As

Tracy M. Bahm

1

Publications

12

Citations

1

H-Index

12

Concepts

All Affiliations

Oak Ridge National Laboratory
TM

About

Tracy M. Bahm is an author at Oak Ridge National Laboratory specializing in instrumentation, crystalline defects, and technology.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Education

1

1

12

2

Engineering

1

1

12

3

Applied Physics

1

1

12

4

Crystalline Defects

1

1

12

5

Microscopy

1

1

12

Tracy M. Bahm

×

1

Publications

12

Citations

1

H-Index

YearCitations

<title>Direct to digital holography for semiconductor wafer defect detection and review</title>

C. E. Thomas, Tracy M. Bahm, L. R. Baylor,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2002

12

Page 1