Pascal Tilmant

Atomic Layer Deposition of Functional Layers for on Chip 3D Li‐Ion All Solid State Microbattery

Manon Létiche, Étienne Eustache, Jérémy Freixas et al. · Advanced Energy Materials · 2016 · 155 citations

Engineering, Functional Layers, Two-dimensional Materials +21

Silicon‐Microtube Scaffold Decorated with Anatase TiO₂ as a Negative Electrode for a 3D Litium‐Ion Microbattery

Étienne Eustache, Pascal Tilmant, Laurence Morgenroth et al. · Advanced Energy Materials · 2014 · 77 citations

Negative Electrode, Engineering, Biomedical Engineering +20

Amplified piezoelectric transduction of nanoscale motion in gallium nitride electromechanical resonators

M. Faucher, B. Grimbert, Y. Cordier et al. · Applied Physics Letters · 2009 · 56 citations

Engineering, Piezoelectric Properties, Amplified Piezoelectric Transduction +18

Micro-patterning of LiPON and lithium iron phosphate material deposited onto silicon nanopillars array for lithium ion solid state 3D micro-battery

Christophe Lethien, Malek Zegaoui, Pascal Roussel et al. · Microelectronic Engineering · 2011 · 53 citations

Materials Science, Engineering, Microfabrication +9

Performances of the Negative Tone Resist AZnLOF 2020 for Nanotechnology Applications

Étienne Herth, Emmanuelle Algré, Pascal Tilmant et al. · IEEE Transactions on Nanotechnology · 2012 · 15 citations

Resist Properties, Engineering, Electron-beam Lithography +19