Koji Sugano

Moving mask UV lithography for three-dimensional structuring

Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano et al. · Journal of Micromechanics and Microengineering · 2006 · 85 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +16

Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system

Koji Sugano, Yuki Uchida, Osamu Ichihashi et al. · Microfluidics and Nanofluidics · 2010 · 56 citations

Engineering, Metal Nanoparticles, Nanomaterials +6

Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

Hiromasa Yagyu, Koji Sugano, Shigehiko Hayashi et al. · Journal of Micromechanics and Microengineering · 2005 · 33 citations

Engineering, Glass Chip, Mechanical Engineering +18

A Differential Capacitive Three-Axis SOI Accelerometer using Vertical Comb Electrodes

H Hamaguchi, Koji Sugano, Toshiyuki Tsuchiya et al. · TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 32 citations

Electrical Engineering, Medical Electronics, Biomedical Sensors +12

Reduction of surface roughness and aperture size effect for etching of Si with XeF₂

Koji Sugano, Osamu Tabata · Journal of Micromechanics and Microengineering · 2002 · 31 citations

Materials Science, Electrical Engineering, Mems Devices +15