Vladimir Korobotchko

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Publications

Citations

113

H-Index

Active since

2002

Affiliations

Troitsk Institute for Innovation and Fusion Research(Current)

Vladimir Korobotchko is an author at Troitsk Institute for Innovation and Fusion Research specializing in plasma sources, high-temperature plasmas, and plasma physics.

Publications per year

2002–2006

Publications

High-power EUV lithography sources based on gas discharges and laser-produced plasmas

Uwe Stamm, Imtiaz Ahmad, István Balogh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 37 citations

Natural Sciences, Materials Science, Physics +14

High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma

Uwe Stamm, Imtiaz Ahmad, Vladimir M. Borisov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 18 citations

Natural Sciences, Manufacturing Engineering, Physics +16

EUV sources for EUV lithography in alpha-, beta-, and high volume chip manufacturing: an update on GDPP and LPP technology

Uwe Stamm, J. Kleinschmidt, K. Gäbel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 16 citations

Natural Sciences, Manufacturing Engineering, Materials Science +8

EUV source power and lifetime: the most critical issues for EUV lithography

Uwe Stamm, J. Kleinschmidt, Kai Gaebel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations

Engineering, Manufacturing Engineering, Physics +14

Development of high-power EUV sources for lithography

Vladimir M. Borisov, Imtiaz Ahmad, Sven Goetze et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations

Natural Sciences, Electrical Engineering, Physics +15

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