Sven Goetze

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Active since

2002

Affiliations

Troitsk Institute for Innovation and Fusion Research(Current)

Sven Goetze is an author at Troitsk Institute for Innovation and Fusion Research specializing in physics, high-temperature plasmas, and pulsed plasma sources.

Publications per year

2002–2004

Publications

High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma

Uwe Stamm, Imtiaz Ahmad, Vladimir M. Borisov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 18 citations

Natural Sciences, Manufacturing Engineering, Physics +16

EUV source power and lifetime: the most critical issues for EUV lithography

Uwe Stamm, J. Kleinschmidt, Kai Gaebel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations

Engineering, Manufacturing Engineering, Physics +14

Development of high-power EUV sources for lithography

Vladimir M. Borisov, Imtiaz Ahmad, Sven Goetze et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations

Natural Sciences, Electrical Engineering, Physics +15

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