Concepedia

Kai Gaebel

KG

Statistics

Publications

2

Citations

32

H-Index

2

Active since

2002

Affiliations

Troitsk Institute for Innovation and Fusion Research(Current)

Kai Gaebel is an author at Troitsk Institute for Innovation and Fusion Research specializing in applied physics, microelectronics, and engineering.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMicroelectronicsElectrical EngineeringExcimer LasersInstrumentationMicrofabricationOptical MaterialsElectronic Packaging

Publications per year

2002–2004

2

Publications

2

High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma

Uwe Stamm, Imtiaz Ahmad, Vladimir M. Borisov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 17 citations

Electrical Engineering, Engineering, High-power Euv Sources +15

EUV source power and lifetime: the most critical issues for EUV lithography

Uwe Stamm, J. Kleinschmidt, Kai Gaebel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations

Optical Materials, Engineering, Critical Issues +17

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