Concepedia
1
Publications
15
Citations
H-Index
2008
Active since
Affiliations
Applied Materials (United States)(Current)
Ming-Chien Chiu is an author at Applied Materials (United States).
Publications per year
2008–2008
Challenges of 29nm half-pitch NAND Flash STI patterning with 193nm dry lithography and self-aligned double patterning
Ming-Chien Chiu, Benjamin S. Lin, M. F. Tsai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 15 citations
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