Concepedia

H.Y. Yang

HY

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Publications

1

Citations

16

H-Index

1

Active since

2009

H.Y. Yang is an author specializing in applied physics, plasma physics, and engineering.

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Publications per year

2009–2009

1

Publications

1

Dry Etching of Germanium by Using Inductively Coupled CF$_{4}$Plasma

T.S. Kim, H.Y. Yang, Y. -H. Kil et al. · Journal of the Korean Physical Society · 2009 · 16 citations

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