Concepedia

T.S. Kim

TK

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Publications

1

Citations

16

H-Index

1

Active since

2009

T.S. Kim is an author specializing in plasma physics, applied physics, and materials science.

Top concepts

Publications per year

2009–2009

1

Publications

1

Dry Etching of Germanium by Using Inductively Coupled CF$_{4}$Plasma

T.S. Kim, H.Y. Yang, Y. -H. Kil et al. · Journal of the Korean Physical Society · 2009 · 16 citations

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