Concepedia

G. S. Chen

GS

1

Publications

17

Citations

1

H-Index

2000

Active since

Affiliations

Feng Chia University(Current)

G. S. Chen is an author at Feng Chia University specializing in surface science, microstructure, and thin films.

Top concepts

Thin FilmsEngineeringMicrostructureApplied PhysicsSurface ScienceMaterial ScienceCrystalline DefectsMaterials Engineering

Publications per year

2000–2000

1

Publications

1

Evaluation of single- and multilayered amorphous tantalum nitride thin films as diffusion barriers in copper metallization

G. S. Chen, S. T. Chen, Ling Yang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 17 citations

Materials Science, Materials Engineering, Material Analysis +13

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