Concepedia

S. T. Chen

ST

2

Publications

50

Citations

2

H-Index

2000

Active since

Affiliations

Feng Chia University(Current)

National Taiwan Ocean University

S. T. Chen is an author at Feng Chia University specializing in microstructure, materials engineering, and thin films.

Top concepts

Thin FilmsEngineeringMicrostructureApplied PhysicsSurface ScienceMaterial ScienceCrystalline DefectsMaterials EngineeringPhysicsNanotechnology

Publications per year

2000–2000

2

Publications

2

An optimal quasisuperlattice design to further improve thermal stability of tantalum nitride diffusion barriers

G. S. Chen, S. C. Huang, S. T. Chen et al. · Applied Physics Letters · 2000 · 33 citations

Engineering, Optimal Quasisuperlattice Design, Thin Film Process Technology +22

Evaluation of single- and multilayered amorphous tantalum nitride thin films as diffusion barriers in copper metallization

G. S. Chen, S. T. Chen, Ling Yang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 17 citations

Materials Science, Materials Engineering, Material Analysis +13

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