Concepedia

Author

C.-I. Kim

Chung-Ang University

Also Known As

C.-I. Kim

2

Publications

101

Citations

1

H-Index

12

Concepts

All Affiliations

Chung-Ang University
CK

About

C.-I. Kim is an author at Chung-Ang University specializing in plasma simulation, microfabrication, and chemical kinetics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

101

2

Applied Physics

1

1

101

3

Physics

1

1

101

4

Microelectronics

1

1

101

5

Plasma Confinement

1

1

101

C.-I. Kim

×

1

Publications

101

Citations

1

H-Index

YearCitations

Simple Model for Ion-Assisted Etching Using<tex>$hboxCl_2hbox--hboxAr$</tex>Inductively Coupled Plasma: Effect of Gas Mixing Ratio

Alexander Efremov, Daewon Kim, C.-I. Kim

IEEE Transactions on Plasma Science

2004

101

Page 1