Concepedia

C.-I. Kim

CK

1

Publications

101

Citations

1

H-Index

2004

Active since

Affiliations

Chung-Ang University(Current)

C.-I. Kim is an author at Chung-Ang University specializing in plasma simulation, microfabrication, and chemical kinetics.

Top concepts

PhysicsEngineeringPlasma PhysicsApplied PhysicsSurface ScienceMicroelectronicsMicrofabricationChemical KineticsPlasma SimulationPlasma Confinement

Publications per year

2004–2004

1

Publications

1

Simple Model for Ion-Assisted Etching Using&lt;tex&gt;$hboxCl_2hbox--hboxAr$&lt;/tex&gt;Inductively Coupled Plasma: Effect of Gas Mixing Ratio

Alexander Efremov, Daewon Kim, C.-I. Kim · IEEE Transactions on Plasma Science · 2004 · 101 citations

Engineering, Simple Model, Ion-assisted Etching Using +20

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