Statistics
Publications
2
Citations
22
H-Index
2
Active since
1967
Affiliations
Tohoku University(Current)
T. Funayama is an author at Tohoku University specializing in materials science, engineering, and x-ray lithography.
Publications per year
1967–1975
2
2
Abstract: New x-ray mask of Al–Al2O3 structure
T. Funayama, Yosuke Takayama, Tetsuya Inagaki et al. · Journal of Vacuum Science and Technology · 1975 · 11 citations
Measurements of Lifetime in GaAs Diodes
M. Takusagawa, T. Funayama, Jun‐ichi Nishizawa et al. · Journal of Applied Physics · 1967 · 11 citations
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