Adli A. Saleh

A comparative study on inductively-coupled plasma high-density plasma, plasma-enhanced, and low pressure chemical vapor deposition silicon nitride films

Jiro Yota, J. Hander, Adli A. Saleh · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 97 citations

Materials Science, Engineering, Hdp Cvd Film +15

Epitaxial growth of fcc Ti films on Al(001) surfaces

Adli A. Saleh, V. Shutthanandan, N. R. Shivaparan et al. · Physical review. B, Condensed matter · 1997 · 59 citations

Materials Science, Engineering, Physics +13

Observation of ultrathin metastable fcc Ti films on Al(110) surfaces

Adli A. Saleh, V. Shutthanandan, Richard J. Smith · Physical review. B, Condensed matter · 1994 · 53 citations

Materials Science, Aluminium Nitride, Surface Characterization +12

Alloy formation at the Ni–Al interface for nickel films deposited on Al(110) surfaces

V. Shutthanandan, Adli A. Saleh, Richard J. Smith · Surface Science · 2000 · 42 citations

Materials Science, Engineering, Ni–al Interface +7

Growth of ultrathin Pd films on Al(001) surfaces

V. Shutthanandan, Adli A. Saleh, N. R. Shivaparan et al. · Surface Science · 1996 · 35 citations

Materials Science, Ultrathin Pd Films, Surface Characterization +6