S. Regnery

SrTa 2 O 6 thin films for high-K dielectric applications grown by chemical vapor deposition on different substrates

S. Regnery, Reji Thomas, P. Ehrhart et al. · Journal of Applied Physics · 2005 · 45 citations

Materials Science, Materials Engineering, Oxide Heterostructures +13

Interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates

Jiaqing He, S. Regnery, Chun‐Lin Jia et al. · Journal of Applied Physics · 2002 · 28 citations

Materials Science, Materials Engineering, Microstructural Properties +15

Mononuclear Mixed β‐Ketoester‐alkoxide Compound of Titanium as a Promising Precursor for Low‐Temperature MOCVD of TiO₂ Thin Films

R. Bhakta, Frank Hipler, Anjana Devi et al. · Chemical Vapor Deposition · 2003 · 26 citations

Materials Science, Inorganic Chemistry, Low‐temperature Mocvd +15

An interfacial defect layer observed at (Ba,Sr)TiO3/Pt interface

H. Z. Jin, Jialin Zhu, P. Ehrhart et al. · Thin Solid Films · 2003 · 25 citations

Materials Science, Engineering, Oxide Electronics +5

BST thin films grown in a multiwafer MOCVD reactor

Fotios Fitsilis, S. Regnery, P. Ehrhart et al. · Journal of the European Ceramic Society · 2001 · 19 citations

Materials Engineering, Engineering, Applied Physics +4