Concepedia

Katja Väyrynen

KV

7

Publications

137

Citations

7

H-Index

2017

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

National Institute of Chemical Physics and Biophysics

Katja Väyrynen is an author at University of Helsinki specializing in engineering, surface science, and materials science.

ORCID

Top concepts

Publications per year

2017–2019

7

Publications

7

Diamine Adduct of Cobalt(II) Chloride as a Precursor for Atomic Layer Deposition of Stoichiometric Cobalt(II) Oxide and Reduction Thereof to Cobalt Metal Thin Films

Katja Väyrynen, Timo Hatanpää, Miika Mattinen et al. · Chemistry of Materials · 2018 · 40 citations · Full text

, , +15

Low-Temperature Atomic Layer Deposition of Low-Resistivity Copper Thin Films Using Cu(dmap)<sub>2</sub> and Tertiary Butyl Hydrazine

Katja Väyrynen, Kenichiro Mizohata, J. Räisänen et al. · Chemistry of Materials · 2017 · 33 citations

, , +13

Atomic Layer Deposition of Intermetallic Co<sub>3</sub>Sn<sub>2</sub> and Ni<sub>3</sub>Sn<sub>2</sub> Thin Films

Katja Väyrynen, Timo Hatanpää, Miika Mattinen et al. · Advanced Materials Interfaces · 2018 · 22 citations · Full text

, , +19

Nickel Germanide Thin Films by Atomic Layer Deposition

Katja Väyrynen, Anton Vihervaara, Timo Hatanpää et al. · Chemistry of Materials · 2019 · 11 citations · Full text

Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursors

Ville Miikkulainen, Katja Väyrynen, Kenichiro Mizohata et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 11 citations · Full text

, , +15

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