Concepedia

Catherine Azzaro‐Pantel

CA

2

Publications

25

Citations

2

H-Index

1999

Active since

Affiliations

Université Toulouse III - Paul Sabatier(Current)

Institut National Polytechnique de Toulouse

Centre National de la Recherche Scientifique

Laboratoire de Génie Chimique

Catherine Azzaro‐Pantel is an author at Université Toulouse III - Paul Sabatier specializing in chemical kinetics, engineering, and applied physics.

Top concepts

Publications per year

1999–1999

2

Publications

2

Analysis and Modeling of Low Pressure CVD of Silicon Nitride from a Silane‐Ammonia Mixture: II. Deposition Modeling

Khalid Yacoubi, Catherine Azzaro‐Pantel, Jean‐Pierre Couderc · Journal of The Electrochemical Society · 1999 · 13 citations

, , +12

Analysis and Modeling of Low Pressure CVD of Silicon Nitride from a Silane‐Ammonia Mixture: I. Experimental Study and Determination of a Gaseous Phase Mechanism

Khalid Yacoubi, Catherine Azzaro‐Pantel, E. Scheid et al. · Journal of The Electrochemical Society · 1999 · 12 citations

, , +14

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