Vincent P. J. Chung

Resorcinol–formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor

Vincent P. J. Chung, Ming‐Chuen Yip, Weileun Fang · Sensors and Actuators B Chemical · 2015 · 33 citations

Engineering, Materials Engineering, Materials Science +14

Vertically integrated CMOS-MEMS capacitive humidity sensor and a resistive temperature detector for environment application

Sih-Chieh Chen, Vincent P. J. Chung, Da‐Jeng Yao et al. · 2017 · 22 citations

Engineering, Environmental Engineering, Microelectromechanical Systems +16

High dynamic range CMOS-MEMS capacitive accelerometer array

Metin G. Guney, Xiaoliang Li, Vincent P. J. Chung et al. · 2018 · 13 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A High Dynamic Range CMOS-MEMS Accelerometer Array with Drift Compensation and Fine-Grain Offset Compensation

Xiaoliang Li, Vincent P. J. Chung, Metin G. Guney et al. · 2019 · 12 citations

Engineering, Electrical Engineering, Mechatronics Engineering +17

Sidewall Metallization on CMOS MEMS by Platinum ALD Patterning

Yi-Chung Lin, Vincent P. J. Chung, S. Santhanam et al. · Journal of Microelectromechanical Systems · 2020 · 12 citations

Engineering, Electrical Engineering, Materials Science +17