Tsuneo Hamaguchi

Epitaxial film transfer technique for producing single crystal Si film on an insulating substrate

M. Kimura, Koji Egami, Masaru Kanamori et al. · Applied Physics Letters · 1983 · 18 citations

Engineering, Materials Engineering, Materials Science +17

Novel LSI/SOI wafer fabrication using device layer transfer technique

Tsuneo Hamaguchi, E. Endo, M. Kimura et al. · 1985 · 16 citations

Engineering, Electrical Engineering, Materials Science +17

Cavity-backed MEMS patch antennas on double-layer silicon wafers

Y. Koga, Y. Yoshida, Atsushi Yamashita et al. · 2006 IEEE Antennas and Propagation Society International Symposium · 2006 · 12 citations

Engineering, Electrical Engineering, Antennas +16

Laser recrystallization of silicon stripes in SiO2 grooves with a polycrystalline silicon sublayer

Koji Egami, Masakazu Kimura, Tsuneo Hamaguchi · Applied Physics Letters · 1983 · 11 citations

Engineering, Materials Engineering, Materials Science +17

Crystallographic orientation control of silicon stripes in SiO2 grooves using a new double laser annealing technique

Koji Egami, Masakazu Kimura, Tsuneo Hamaguchi · Applied Physics Letters · 1984 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +17