M. J. Schabel

Hydrogen control of carbon deposit morphology

P.E. Nolan, M. J. Schabel, D. C. Lynch et al. · Carbon · 1995 · 106 citations

Chemical Engineering, Carbon Sequestration, Engineering +5

Determination of electron temperature, atomic fluorine concentration, and gas temperature in inductively coupled fluorocarbon/rare gas plasmas using optical emission spectroscopy

M. J. Schabel, Vincent M. Donnelly, A. Kornblit et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 65 citations

Engineering, Atomic Emission Spectroscopy, Optical Emission Spectroscopy +22

Optical plasma emission spectroscopy of etching plasmas used in Si-based semiconductor processing

Vincent M. Donnelly, M. V. Malyshev, M. J. Schabel et al. · Plasma Sources Science and Technology · 2002 · 52 citations

Optical Materials, Engineering, Atomic Emission Spectroscopy +19

Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy

Vincent M. Donnelly, M. J. Schabel · Journal of Applied Physics · 2002 · 38 citations

Electron Temperatures, Engineering, Icp Window +18

Measurement of Individual Particle Atomic Composition by Aerosol Mass Spectrometry

W. D. Reents, M. J. Schabel · Analytical Chemistry · 2001 · 38 citations

Sodium Chloride, Environmental Monitoring, Engineering +17