R. Bilenchi

Hydrogenated amorphous silicon growth by CO2 laser photodissociation of silane

R. Bilenchi, I. Gianinoni, M. Musci · Journal of Applied Physics · 1982 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +16

Electrical Properties of Thermally and Laser Annealed Polycrystalline Silicon Films Heavily Doped with Arsenic and Phosphorus

S. Solmi, M. Severi, R. Angelucci et al. · Journal of The Electrochemical Society · 1982 · 45 citations

Natural Sciences, Materials Science, Physics +16

CO2 laser-assisted deposition of boron and phosphorus-doped hydrogenated amorphous silicon

R. Bilenchi, I. Gianinoni, M. Musci et al. · Applied Physics Letters · 1985 · 30 citations

Engineering, Materials Engineering, Materials Science +17

Laser Induced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon

R. Bilenchi, I. Gianinoni, M. Musci et al. · MRS Proceedings · 1982 · 11 citations

Engineering, Materials Engineering, Materials Science +14