Ünsal Sökmen

Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures

Ünsal Sökmen, Andrej Stranz, Sönke Fündling et al. · Journal of Micromechanics and Microengineering · 2009 · 55 citations

Exemplary Microstructures, Cryogenic Dry Etching, Engineering +26

Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

Ünsal Sökmen, Andrej Stranz, A. Waag et al. · Journal of Micromechanics and Microengineering · 2010 · 40 citations

Engineering, Mechanical Engineering, Integrated Circuits +18

Shallow and deep dry etching of silicon using ICP cryogenic reactive ion etching process

Ünsal Sökmen, Andrej Stranz, Sönke Fündling et al. · Microsystem Technologies · 2010 · 34 citations

Materials Science, Wafer Scale Processing, Engineering +10

Measurements of thermoelectric properties of silicon pillars

Andrej Stranz, Ünsal Sökmen, J. Kähler et al. · Sensors and Actuators A Physical · 2011 · 25 citations

Electrical Engineering, Engineering, Silicon Pillars +8

Polarity analysis of GaN nanorods by photo‐assisted Kelvin probe force microscopy

Jiandong Wei, R. Neumann, Xue Wang et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2011 · 21 citations

Materials Science, Semiconductors, Abstract Polarity Dependence +14