Concepedia

Askar Rezvanov

AR

5

Publications

97

Citations

5

H-Index

2017

Active since

Affiliations

Moscow Institute of Physics and Technology(Current)

Research Institute of Molecular Electronics

North China University of Technology

MIREA - Russian Technological University

IMEC

Askar Rezvanov is an author at Moscow Institute of Physics and Technology specializing in engineering, electrical insulation, and materials science.

ORCID

Top concepts

Publications per year

2017–2020

5

Publications

5

Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentation

Alexey S. Vishnevskiy, Askar Rezvanov, Dieter Schneider et al. · Langmuir · 2020 · 29 citations

Cryogenic etching of porous low-k dielectrics in CF3Br and CF4 plasmas

Askar Rezvanov, Andrey Miakonkikh, Alexey S. Vishnevskiy et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2017 · 26 citations

, , +17

Effect of terminal methyl group concentration on critical properties and plasma resistance of organosilicate low-k dielectrics

Askar Rezvanov, Andrey Miakonkikh, Alexey S. Vishnevskiy et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 21 citations

, , +18

Area selective grafting of siloxane molecules on low-k dielectric with respect to copper surface

Askar Rezvanov, E. S. Gornev, Jean‐François de Marneffe et al. · Applied Surface Science · 2019 · 11 citations

, , +10

Pore surface grafting of porous low-k dielectrics by selective polymers

Askar Rezvanov, Liping Zhang, Mitsuhiro Watanabe et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2017 · 10 citations

, , +18

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