Concepedia

Tsutomu Aya

TA

1

Publications

19

Citations

1

H-Index

2005

Active since

Affiliations

Tokyo University of Agriculture and Technology(Current)

Tsutomu Aya is an author at Tokyo University of Agriculture and Technology specializing in engineering, thin films, and semiconductors.

Top concepts

Thin FilmsEngineeringSemiconductorsApplied PhysicsMaterial ScienceCrystalline DefectsOptoelectronic Devices

Publications per year

2005–2005

1

Publications

1

Low-Temperature Fabrication of Ultrathin ZrO<sub>2</sub>/Si Structure Using Metal Deposition Followed by Oxygen Annealing

Yoshitaka Nagasato, Tsutomu Aya, Yoshitaka Iwazaki et al. · Japanese Journal of Applied Physics · 2005 · 19 citations

Materials Science, Semiconductors, Oxygen Annealing +13

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