Concepedia

Ferhat Aydinoglu

FA

Statistics

Publications

6

Citations

87

H-Index

6

Active since

2016

Affiliations

University of Waterloo(Current)

Ferhat Aydinoglu is an author at University of Waterloo specializing in materials science, surface science, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationNanomanufacturingNanotechnologyNanofabricationMicroelectronicsMaterials Fabrication

Publications per year

2016–2020

6

Publications

6

Silicon nanostructures with very large negatively tapered profile by inductively coupled plasma-RIE

Asma Ayari-Kanoun, Ferhat Aydinoglu, Bo Cui et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 25 citations

Engineering, Silicon On Insulator, Plasma Processing +19

Chromium oxide as a hard mask material better than metallic chromium

Ferhat Aydinoglu, Fayçal Saffih, Ripon Kumar Dey et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2017 · 16 citations

Thin Resist, Hard Mask Material, Dry Plasma Etching +16

Effect of oxygen plasma cleaning on nonswitching pseudo-Bosch etching of high aspect ratio silicon pillars

Ferhat Aydinoglu, Aixi Pan, Chenxu Zhu et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2020 · 13 citations

Engineering, Plasma Combustion, Vacuum Device +18

Electron Beam Lithography on Irregular Surface Using Grafted PMMA Monolayer as Resist

Ripon Kumar Dey, Ferhat Aydinoglu, Bo Cui · Advanced Materials Interfaces · 2016 · 11 citations

Grafted Polystyrene Monolayer Brush as Both Negative and Positive Tone Electron Beam Resist

Ferhat Aydinoglu, Hirotaka Yamada, Ripon Kumar Dey et al. · Langmuir · 2017 · 11 citations

Monolayer Polystyrene Brush, Engineering, Electron-beam Lithography +18

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