Concepedia

Ayako Sukegawa

AS

2

Publications

35

Citations

2

H-Index

2003

Active since

Affiliations

Nikon (United States)(Current)

Nikon (Japan)

Ayako Sukegawa is an author at Nikon (United States) specializing in computer engineering, engineering, and vibration control.

Top concepts

Publications per year

2003–2007

2

Publications

2

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

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New method to reduce alignment error by optical system

Tadashi Nagayama, Shinichi Nakajima, Ayako Sugaya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 16 citations

, , +10

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