Statistics
Publications
1
Citations
43
H-Index
1
Active since
1995
Nobuhiro Motegi is an author specializing in instrumentation, electronic packaging, and electrical engineering.
Publications per year
1995–1995
1
1
Long-throw low-pressure sputtering technology for very large-scale integrated devices
Nobuhiro Motegi, Y. Kashimoto, Koji Nagatani et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 43 citations
Engineering, Thin Film Process Technology, Chemical Deposition +21
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