Statistics
Publications
2
Citations
57
H-Index
2
Active since
2005
Affiliations
Lawrence Livermore National Security(Current)
Scott Hafeman is an author at Lawrence Livermore National Security specializing in optics, 3d printing, and optical materials.
Publications per year
2005–2007
2
2
Effects of through-focus symmetry in maskless lithography using micromirror arrays
J.-S. Wang, Scott Hafeman, A. R. Neureuther et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 10 citations
Engineering, Manufacturing Engineering, Microelectromechanical Systems +9
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