Concepedia

R. Smati

RS

Statistics

Publications

1

Citations

13

H-Index

1

Active since

2003

Affiliations

University of California, Berkeley(Current)

R. Smati is an author at University of California, Berkeley specializing in chemical engineering, environmental chemistry, and carbon emissions.

Top concepts

EmissionsAir QualityEngineeringAir PollutionCarbon EmissionsEmission ControlSustainable EnergyChemical EngineeringEnvironmental ChemistryEnvironmental Engineering

Publications per year

2003–2003

1

Publications

1

Alternatives to reduce perfluorinated compound (PFC) emissions from semiconductor dielectric etch processes: meeting environmental commitments while minimizing costs

N. Krishnan, R. Smati, S. Raoux et al. · 2003 · 13 citations

Engineering, Pfc Emissions, Air Quality +16

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