Concepedia

Hideo Ohtsuki

HO

9

Publications

188

Citations

9

H-Index

1999

Active since

Affiliations

Tokyo Institute of Technology(Current)

Takeda (Japan)

Hideo Ohtsuki is an author at Tokyo Institute of Technology specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1999–2014

9

Publications

9

Vertical and Smooth Etching of InP by Cl<sub>2</sub>/Xe Inductively Coupled Plasma

Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama et al. · Japanese Journal of Applied Physics · 1999 · 52 citations

, , +20

Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs

Shunya Inoue, Junichi Kashino, Akihiro Matsutani et al. · Japanese Journal of Applied Physics · 2014 · 38 citations

, , +13

Mass Effect of Etching Gases in Vertical and Smooth Dry Etching of InP

Akihiro Matsutani, Hideo Ohtsuki, Seiichi Muta et al. · Japanese Journal of Applied Physics · 2001 · 20 citations

, , +17

Plasma Diagnostics in Inductively Coupled Plasma Etching Using Cl<sub>2</sub>/Xe

Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama et al. · Japanese Journal of Applied Physics · 2000 · 16 citations

, , +10

Iodine Solid Source Inductively Coupled Plasma Etching of InP

Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama · Japanese Journal of Applied Physics · 2005 · 14 citations

, , +11

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