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Seiichi Muta

SM

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Publications

1

Citations

20

H-Index

1

Active since

2001

Affiliations

Takeda (Japan)(Current)

Seiichi Muta is an author at Takeda (Japan) specializing in microfabrication, engineering, and applied physics.

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Publications per year

2001–2001

1

Publications

1

Mass Effect of Etching Gases in Vertical and Smooth Dry Etching of InP

Akihiro Matsutani, Hideo Ohtsuki, Seiichi Muta et al. · Japanese Journal of Applied Physics · 2001 · 20 citations

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