Concepedia

Author

Seiichi Muta

Takeda (Japan)

Also Known As

Seiichi Muta

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Publications

20

Citations

1

H-Index

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Concepts

All Affiliations

Takeda (Japan)
SM

About

Seiichi Muta is an author at Takeda (Japan) specializing in microfabrication, engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Engineering

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Applied Physics

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Electrical Engineering

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Materials Science

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Physics

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Seiichi Muta

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1

Publications

20

Citations

1

H-Index

YearCitations

Mass Effect of Etching Gases in Vertical and Smooth Dry Etching of InP

Akihiro Matsutani, Hideo Ohtsuki, Seiichi Muta,

Japanese Journal of Applied Physics

2001

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