2
Publications
30
Citations
2
H-Index
2000
Active since
Affiliations
Sentech Corporation (United States)(Current)
Shashikant Patel is an author at Sentech Corporation (United States) specializing in applied physics, engineering, and ophthalmology.
Top concepts
EngineeringApplied PhysicsPhysicsChemistryLaser DamageSpectroscopyOphthalmologyPhotochemistryOptoelectronicsSurface Science
Publications per year
2000–2001
2
2
Pattern collapse in high-aspect-ratio DUV and 193-nm resists
Wolf‐Dieter Domke, Victoria L. Graffenberg, Shashikant Patel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 16 citations
Engineering, Mechanical Engineering, Semiconductor Device +16
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