Hakseung Lee

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Active since

2017

Affiliations

Hakseung Lee is an author at Samsung (South Korea) specializing in inductively coupled plasma optical emission spectrometry, optical emission spectroscopy, and direct wafer bonding.

ORCID

Publications per year

2017–2021

Publications

Multi-Stack Wafer Bonding Demonstration utilizing Cu to Cu Hybrid Bonding and TSV enabling Diverse 3D Integration

Taeseong Kim, Sohye Cho, SeonKwan Hwang et al. · 2021 · 34 citations

Engineering, Materials Engineering, Materials Science +15

Sensitivity Enhancement of Dielectric Plasma Etching Endpoint Detection by Optical Emission Spectra With Modified $K$ -Means Cluster Analysis

Haegyu Jang, Hakseung Lee, Honyoung Lee et al. · IEEE Transactions on Semiconductor Manufacturing · 2017 · 21 citations

Natural Sciences, Physics, Optoelectronics +12

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