Concepedia
Statistics
Publications
5
Citations
84
H-Index
Active since
2013
Affiliations
The University of Osaka(Current)
Tokyo Electron (Japan)
Sho Kumakura is an author at The University of Osaka specializing in natural sciences, plasma sources, and physics.
Publications per year
2013–2022
New tandem type ion source based on electron cyclotron resonance for universal source of synthesized ion beams
Yushi Kato, Yosuke Kurisu, Dai Nozaki et al. · Review of Scientific Instruments · 2014 · 20 citations
Natural Sciences, Physics, Instrumentation +8
Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source
Sho Kumakura, Yosuke Kurisu, Daiju Kimura et al. · Review of Scientific Instruments · 2013 · 18 citations
Natural Sciences, Physics, Analytical Chemistry +14
Novel technology of high-aspect-ratio etch utilizing coverage-controllable atomic layer deposition
Sho Kumakura, Hironari Sasagawa, Tetsuya Nishizuka et al. · Japanese Journal of Applied Physics · 2022 · 18 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Controlling precise magnetic field configuration around electron cyclotron resonance zone for enhancing plasma parameters and beam current
Keisuke Yano, Yosuke Kurisu, Dai Nozaki et al. · Review of Scientific Instruments · 2013 · 15 citations
Natural Sciences, Electrical Engineering, Physics +13
A method for high selective etch of Si <sub>3</sub> N <sub>4</sub> and SiC with ion modification and chemical removal
Sho Kumakura, Masahiro Tabata, Masanobu Honda · Japanese Journal of Applied Physics · 2019 · 13 citations
Engineering, Materials Engineering, Materials Science +17
1–5 of 5