Statistics
Publications
6
Citations
112
H-Index
6
Active since
2005
Affiliations
Eric Guo is an author at Semiconductor Manufacturing International (China) specializing in process window development, mask design, and mask pattern fidelity.
Publications per year
2005–2018
6
6
Pushing the lithography limit: applying inverse lithography technology (ILT) at the 65nm generation
Chi‐Yuan Hung, Bin Zhang, Eric Guo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 24 citations
Engineering, Computer Engineering, Electrical Engineering +13
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