Concepedia
Statistics
Publications
10
Citations
683
H-Index
Active since
1995
Affiliations
Sandia National Laboratories(Current)
University of Houston
B. P. Aragon is an author at Sandia National Laboratories specializing in plasma physics, physics, and natural sciences.
Publications per year
1995–2004
An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell
Paul Miller, G. A. Hebner, K. E. Greenberg et al. · Journal of Research of the National Institute of Standards and Technology · 1995 · 221 citations · Full text
Natural Sciences, Electrical Engineering, Physics +15
Ion energy and angular distributions in inductively coupled radio frequency discharges in argon
J. R. Woodworth, M. E. Riley, Dorothy C. Meister et al. · Journal of Applied Physics · 1996 · 135 citations
Natural Sciences, Electrical Engineering, Nuclear Instrumentation +13
Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges
J. R. Woodworth, M. E. Riley, V. A. Amatucci et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 81 citations
Natural Sciences, Electrical Engineering, Physics +13
Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge
J. R. Woodworth, Matthew G. Blain, Robert Jarecki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 58 citations · Full text
Natural Sciences, Physics, Optics +11
Ion energy distributions at rf-biased wafer surfaces
J. R. Woodworth, I. C. Abraham, M. E. Riley et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 55 citations
Natural Sciences, Electrical Engineering, Physics +10
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