4
Publications
112
Citations
4
H-Index
1993
Active since
Affiliations
Theodore G. van Kessel is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, electrical engineering, and calibration.
Top concepts
EngineeringCalibrationData ScienceElectrical EngineeringEducationMeasurementData CentersEarth SciencePhotochemistryRemote Sensing
Publications per year
1993–2019
4
4
Postexposure bake as a process-control parameter for chemically amplified photoresist
John L. Sturtevant, Steven J. Holmes, Theodore G. van Kessel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 15 citations
Postexposure Bake, Engineering, Electron-beam Lithography +19
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