Statistics
Publications
1
Citations
20
H-Index
1
Active since
2000
W.-Y. Li is an author specializing in electronic materials, reaction - diffusion modeling, and line-edge roughness.
Publications per year
2000–2000
1
1
Roughness study of a positive tone high performance SCALPEL resist
Leonidas E. Ocola, P.A. Orphanos, W.-Y. Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 20 citations
Natural Sciences, Materials Engineering, Materials Science +14
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