C Wölfel

Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge

Moritz Oberberg, Dennis Engel, Birk Berger et al. · Plasma Sources Science and Technology · 2019 · 31 citations · Full text

Natural Sciences, Electrical Engineering, Physics +17

The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O₂

Moritz Oberberg, Birk Berger, M Buschheuer et al. · Plasma Sources Science and Technology · 2020 · 30 citations · Full text

Natural Sciences, Physics, Electromagnetics +14

Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code

Denis Eremin, Birk Berger, Dennis Engel et al. · Plasma Sources Science and Technology · 2023 · 20 citations · Full text

Natural Sciences, Physics, Electromagnetics +16

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

Denis Eremin, Dennis Engel, Dennis Krüger et al. · Plasma Sources Science and Technology · 2023 · 19 citations · Full text

Natural Sciences, Electrical Engineering, Physics +17

Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results

Birk Berger, Denis Eremin, Moritz Oberberg et al. · Plasma Sources Science and Technology · 2023 · 16 citations · Full text

Natural Sciences, Electrical Engineering, Physics +15