Moritz Oberberg

Experimental investigations of the magnetic asymmetry effect in capacitively coupled radio frequency plasmas

Moritz Oberberg, J Kallähn, Peter Awakowicz et al. · Plasma Sources Science and Technology · 2018 · 46 citations · Full text

Engineering, Magnetized Plasma Physics, Plasma Science +19

Comparison of Langmuir probe and multipole resonance probe measurements in argon, hydrogen, nitrogen, and oxygen mixtures in a double ICP discharge

Marcel Fiebrandt, Moritz Oberberg, Peter Awakowicz · Journal of Applied Physics · 2017 · 31 citations

Langmuir Probe, Engineering, Glow Discharge +17

Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge

Moritz Oberberg, Dennis Engel, Birk Berger et al. · Plasma Sources Science and Technology · 2019 · 31 citations · Full text

Electrical Engineering, Engineering, Radiation Generation +10

The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O₂

Moritz Oberberg, Birk Berger, M Buschheuer et al. · Plasma Sources Science and Technology · 2020 · 29 citations · Full text

Engineering, Radio Frequency, Magnetized Plasma Physics +22

Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

Denis Eremin, Dennis Engel, Dennis Krüger et al. · Plasma Sources Science and Technology · 2023 · 17 citations · Full text