Anke Vierheller

Surface-Passive Pressure Sensor by Femtosecond Laser Glass Structuring for Flip-Chip-in-Foil Integration

Martin Schwerter, Daniel Gräbner, Lars Hecht et al. · Journal of Microelectromechanical Systems · 2016 · 26 citations

Engineering, Mechanical Engineering, Biomedical Engineering +22

Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

Mayra Garcés-Schröder, Lars Hecht, Anke Vierheller et al. · 2017 · 16 citations · Full text

Materials Science, Engineering, Soft Robotics +13

Fluid mechanics and process design of high-pressure antisolvent precipitation of fenofibrate nanoparticles using a customized microsystem

Sebastian Melzig, Jan Henrik Finke, Carsten Schilde et al. · Chemical Engineering Journal · 2019 · 15 citations

Materials Science, Chemical Engineering, Colloidal Material +9

Innovative process chain for the development of wear resistant 3D metal microsystems

Claudia Richter, Daniel Stegemann, Anke Vierheller et al. · Microelectronic Engineering · 2013 · 13 citations

Materials Science, Metal Microsystems, Engineering +10

Particle-Based Microfluidic Quartz Crystal Microbalance (QCM) Biosensing Utilizing Mass Amplification and Magnetic Bead Convection

Jan-W. Thies, Bettina Thürmann, Anke Vierheller et al. · Micromachines · 2018 · 12 citations · Full text

Nanosensors, Engineering, Magnetic Bead Convection +20