Concepedia

Steven Buswell

SB

Statistics

Publications

2

Citations

54

H-Index

2

Active since

2009

Affiliations

University of Alberta(Current)

Applied Nanotools (Canada)

National Institute for Nanotechnology

Steven Buswell is an author at University of Alberta specializing in electron beam lithography, materials science, and nanotechnology.

Publications per year

2009–2011

2

Publications

2

Nanopatterning of PMMA on insulating surfaces with various anticharging schemes using 30 keV electron beam lithography

Mustafa Muhammad, Steven Buswell, S. K. Dew et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 28 citations

, , +10

Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithography

Mohammad Mohammad, Taras Fito, Jiawei Chen et al. · Microelectronic Engineering · 2009 · 26 citations

, , +16

1–2 of 2