Concepedia

Shiho Sasaki

SS

Statistics

Publications

7

Citations

86

H-Index

7

Active since

2004

Affiliations

Dai Nippon Printing (Japan)(Current)

Shiho Sasaki is an author at Dai Nippon Printing (Japan) specializing in engineering, microelectronics, and electronic packaging.

Top concepts

EngineeringMicroelectronicsElectronic PackagingElectrical EngineeringOptoelectronicsMicrofabricationComputer EngineeringDesign3D PrintingMaterial Science

Publications per year

2004–2021

7

Publications

7

A visible-light communication system using optical CDMA with inverted MPSC

T. Matsushima, Shiho Sasaki, Masaki Kakuyama et al. · 2013 · 19 citations

Free-space Optical Network, Photonics, Visible-light Communication Systems +11

Process development for EUV mask production

Tsukasa Abe, Akiko Fujii, Shiho Sasaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 14 citations

Engineering, Industrial Engineering, Process Development +18

UV NIL template making and imprint evaluation

Shiho Sasaki, Takaaki Hiraka, Jun Mizuochi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 12 citations

Imprint Evaluation, Engineering, Electron-beam Lithography +18

EUV-mask pattern inspection using current DUV reticle inspection tool

Tsukasa Abe, Akiko Fujii, Shiho Sasaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Electrical Engineering, Machine Vision, Image Analysis +13

Evaluation of dry etching and defect repair of EUVL mask absorber layer

Tsukasa Abe, Masaharu Nishiguchi, Tsuyoshi Amano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations

Materials Science, Afm Machining, Engineering +12

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