N. Hosoi - Concepedia

Author

N. Hosoi

Also Known As

N. Hosoi, Nobuki Hosoi

Publications

153

Citations

H-Index

Concepts

All Affiliations

N. Hosoi is an author at NEC (Japan) specializing in engineering, applied physics, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	114
2	Applied Physics	5	5	114
3	Materials Science	5	5	114
4	Materials Engineering	3	3	92
5	Chemistry	1	1	10

N. Hosoi

Publications

114

Citations

H-Index

Page 1

	Year	Citations
Lower-temperature plasma etching of Cu films using infrared radiation N. Hosoi, Yoshio Ohshita Applied Physics Letters Materials EngineeringMaterials ScienceCu FilmsEngineeringSurface Science	1993	36
Evaluation of Cu adhesive energy on barrier metals by means of contact-angle measurement Akira Furuya, N. Hosoi, Yoshio Ohshita Journal of Applied Physics EngineeringMechanical EngineeringThin Film Process TechnologySurface TechnologyElectronic Packaging	1995	33
Lower temperature plasma etching of Cu using IR light irradiation Yoshio Ohshita, N. Hosoi Thin Solid Films Materials ScienceMaterials EngineeringEngineeringRadiation GenerationIr Light Irradiation	1995	23
In-situ monitoring of surface reactions in Si vapor phase epitaxial growth by surface photo-absorption method Yoshio Ohshita, N. Hosoi Journal of Crystal Growth Materials ScienceEngineeringSurface Photo-absorption MethodSurface ReactionsSurface Science	1993	12
<i>In</i> <i>situ</i> optical investigation of the etching process in the silicon HCl system Yoshio Ohshita, N. Hosoi Applied Physics Letters Optical MaterialsEngineeringSicl2 MoleculesChemistryOptical Characterization	1993	10

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