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In-situ monitoring of surface reactions in Si vapor phase epitaxial growth by surface photo-absorption method

Materials ScienceEngineeringSurface Photo-absorption MethodSurface ReactionsSurface ScienceApplied PhysicsSemiconductor Device FabricationIn-situ MonitoringMolecular Beam EpitaxySilicon On InsulatorEpitaxial GrowthOptoelectronicsChemical Vapor Deposition