Concepedia

T. Shiota

TS

Statistics

Publications

3

Citations

54

H-Index

3

Active since

1994

Affiliations

Mitsubishi Materials (Japan)(Current)

T. Shiota is an author at Mitsubishi Materials (Japan) specializing in silicon materials, semiconductor materials, and materials science.

Publications per year

1994–1996

3

Publications

3

Degradation of dielectric breakdown field of thermal SiO2 films due to structural defects in Czochralski silicon substrates

Y. Satoh, T. Shiota, Yoshio Murakami et al. · Journal of Applied Physics · 1996 · 27 citations

, , +17

Effect of oxidation ambient on the dielectric breakdown characteristics of thermal oxide films of silicon

Yoshio Murakami, T. Shiota, Takayuki Shingyouji et al. · Journal of Applied Physics · 1994 · 15 citations

, , +17

Studies of the chemical kinetics on the vapor phase axial deposition method

Kazushi SANADA, T. Shiota, K. Inada · Journal of Non-Crystalline Solids · 1995 · 12 citations

, , +10

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