S. Yamaguchi

Diffusion barrier property of TaN between Si and Cu

Takeo Oku, Eiji Kawakami, Masaki Uekubo et al. · Applied Surface Science · 1996 · 240 citations

Diffusion Barrier Property, Engineering, Physics +5

Neutron radiation damage in NbO single crystals

Takashi Onozuka, M. Koiwa, Yoshihisa Ishikawa et al. · Radiation Effects · 1977 · 140 citations

Engineering, Nuclear Physics, Radiation Materials Science +16

WNx diffusion barriers between Si and Cu

Masaki Uekubo, Takeo Oku, Kazushi Nii et al. · Thin Solid Films · 1996 · 140 citations

Physics, Applied Physics, Semiconductor Material +3

Structural Properties of Amorphous Carbon Nitride Films Prepared by Reactive RF-Magnetron Sputtering

Noriaki Nakayama, Yasuaki Tsuchiya, Satoru Tamada et al. · Japanese Journal of Applied Physics · 1993 · 123 citations

Engineering, Cubic Boron Nitride, Chemistry +17

Formation of Al–Zr composite oxide films on aluminum by sol–gel coating and anodizing

Keiji Watanabe, Masatoshi Sakairi, Hideaki Takahashi et al. · Journal of Electroanalytical Chemistry · 1999 · 87 citations

Materials Engineering, Materials Science, Sol–gel Coating +6