Statistics
Publications
5
Citations
319
H-Index
5
Active since
2005
Affiliations
Wei-Ming Yeh is an author at Georgia Institute of Technology specializing in natural sciences, thin film lithography, and materials science.
Publications per year
2005–2011
5
5
Kuo–Chuan Ho, Wei-Ming Yeh, Tsai‐Shih Tung et al. · Analytica Chimica Acta · 2005 · 153 citations
Comparison of positive tone versus negative tone resist pattern collapse behavior
Wei-Ming Yeh, David E. Noga, Richard A. Lawson et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 34 citations
Natural Sciences, Materials Engineering, Materials Science +15
Methods to explore and prevent pattern collapse in thin film lithography
David E. Noga, Wei-Ming Yeh, Richard A. Lawson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 11 citations
Natural Sciences, Materials Engineering, Materials Science +17
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